A new piezodriven precision micropositioning stage utilizing flexure hinges

被引：101

作者：

Gao, P

Swei, SM

Yuan, ZJ

机构：

[1] Nanyang Technol Univ, Sch MPE, Singapore 639798, Singapore

[2] Harbin Inst Technol, Dept ME, Harbin 150001, Peoples R China

来源：

NANOTECHNOLOGY | 1999年 / 10卷 / 04期

关键词：

D O I：

10.1088/0957-4484/10/4/306

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

A precision micropositioning system with a high displacement resolution and wide motion range has been required for industrialized applications for a long time. This paper discusses the design and the characteristics of a new piezodriven precision micropositioning stage utilizing flexure hinges. Two-grade amplifying and a monolithic symmetrical mechanism are adopted in the design. An analytical model is presented and a series of formulae for the static and dynamic behaviour of the stage are derived. Based on the theoretical analysis, the optimum design schema is put forward. The experimental demonstration to study the performance of the stage is described, and the method for reducing nonlinearity errors is proposed. The experimental results are in close agreement with those predicted by the theoretical analysis.

引用

页码：394 / 398

页数：5

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