Arrayed ultrasonic microsensors with high directivity for in-air use using PZT thin film on silicon diaphragms

被引：128

作者：

Yamashita, K

Katata, H

Okuyama, M

Miyoshi, H

Kato, G

Aoyagi, S

Suzuki, Y

机构：

[1] Osaka Univ, Grad Sch Engn Sci, Toyonaka, Osaka 5608531, Japan

[2] Kansai Univ, Fac Engn, Suita, Osaka 5648680, Japan

[3] Technol Res Inst Osaka Prefecture, Izumi, Osaka 5941157, Japan

来源：

SENSORS AND ACTUATORS A-PHYSICAL | 2002年 / 97-8卷

关键词：

ultrasonic; array sensor; PZT;

D O I：

10.1016/S0924-4247(02)00037-7

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

An ultrasonic microarray sensor using piezoelectric diaphragms has been fabricated and applied to recognition of a three-dimensional object. The sensor consists of piezoelectric PZT (Pb(Zr,Ti)O-3) thin film on 18 diaphragms of micromachined SOI wafer. The array is designed to obtain a sharp directivity considering wavelength of ultrasound in air and the chip size for micromachine applications. Three-dimensional images have been successfully obtained by scanning the sensor. (C) 2002 Elsevier Science B.V. All rights reserved.

引用

页码：302 / 307

页数：6

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