High quality factor photonic crystal nanobeam cavities

被引：394

作者：

Deotare, Parag B. ^{[1
]}

McCutcheon, Murray W. ^{[1
]}

Frank, Ian W. ^{[1
]}

Khan, Mughees ^{[1
]}

Loncar, Marko ^{[1
]}

机构：

[1] Harvard Univ, Sch Engn & Appl Sci, Cambridge, MA 02138 USA

来源：

APPLIED PHYSICS LETTERS | 2009年 / 94卷 / 12期

基金：

加拿大自然科学与工程研究理事会;

关键词：

laser cavity resonators; mirrors; optical fabrication; photonic crystals; Q-factor; SINGLE QUANTUM-DOT; OPTICAL WAVE-GUIDES; NANOCAVITY; MICROCAVITIES; LASER; SYSTEM; REFLECTIVITY; MODES; SLAB; GAP;

D O I：

10.1063/1.3107263

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

We investigate the design, fabrication, and experimental characterization of high quality factor photonic crystal nanobeam cavities in silicon. Using a five-hole tapered one-dimensional photonic crystal mirror and precise control of the cavity length, we designed cavities with theoretical quality factors as high as 1.4x10(7). By detecting the cross-polarized resonantly scattered light from a normally incident laser beam, we measure a quality factor of nearly 7.5x10(5). The effect of cavity size on mode frequency and quality factor was simulated and then verified experimentally.

引用

页数：3

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