Selective-area growth of vertically aligned GaAs and GaAs/AlGaAs core-shell nanowires on Si(111) substrate

被引:136
作者
Tomioka, Katsuhiro [1 ]
Kobayashi, Yasunori [1 ]
Motohisa, Junichi [1 ]
Hara, Shinjiroh [2 ]
Fukui, Takashi [1 ,2 ]
机构
[1] Hokkaido Univ, Grad Sch Informat Sci Technol, Sapporo, Hokkaido 0600814, Japan
[2] Hokkaido Univ, RCIQE, Sapporo, Hokkaido 0608628, Japan
基金
日本学术振兴会;
关键词
V-SEMICONDUCTOR NANOWIRES; INP NANOWIRES; INAS NANOWIRES; HIGHLY UNIFORM; SILICON; MOVPE; PHASE; SURFACES; WHISKERS; EPITAXY;
D O I
10.1088/0957-4484/20/14/145302
中图分类号
TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
We report on selective-area growth of vertically aligned GaAs nanowires on Si(111) substrate. Modification of the initial Si(111) surface by pretreatment under an AsH(3) atmosphere and low-temperature growth of GaAs were important for controlling the growth orientations of the GaAs nanowire on the Si(111) surface. We also found that the size of openings strongly affected the growth morphology of GaAs nanowires on Si(111). Small diameter openings reduced the antiphase defects and improved the optical properties in the GaAs nanowires. Moreover, we realized coherent growth without misfit dislocation at the GaAs/Si interface. Finally, we demonstrated fabrication of a GaAs/AlGaAs core-shell nanowire array on a Si surface and revealed that the luminescence intensity was markedly enhanced by passivation effects. These results are promising for future III-V nanowire-based optoelectronic integration on Si platforms.
引用
收藏
页数:8
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