Post-cure shrinkage of photo-sensitive material used in laser lithography process

被引:38
作者
Fuh, JYH [1 ]
Choo, YS [1 ]
Lu, L [1 ]
Nee, AYC [1 ]
Wong, YS [1 ]
Wang, WL [1 ]
Miyazawa, T [1 ]
Ho, SH [1 ]
机构
[1] NATL UNIV SINGAPORE,CAE,CAD,CAM CTR,SINGAPORE 119260,SINGAPORE
关键词
shrinkage; laser lithography; photo-polymerisation; thermal curing; and UV curing;
D O I
10.1016/S0924-0136(96)02744-6
中图分类号
T [工业技术];
学科分类号
08 [工学];
摘要
Shrinkage causes distortion and warpage due to the internal stresses built up during fabrication, and greatly influences the dimensional accuracy of a part. This paper presents an experimental study on the relationships between the key parameters of the laser lithography (LL) (or commonly known as Stereolithography) process and the resulting post-curing shrinkage due to thermal and ultraviolet (UV) exposure. The UV-sensitive material used in the experiment is an acrylic-based resin, namely SCR-310. The post-curing process causes partially-cured and uncured resin to be further polymerised and is necessary for the improvement of the final mechanical properties of the parts. In principle, a larger laser power or a smaller layer pitch will result in a smaller amount of partially-cured or uncured resin, with less shrinkage after post-curing. A better understanding of the behaviour and characterisation of the shrinkage process during thermal and UV treatments will help to reduce the post-cure distortion, and will lead to more accurate rapid prototypes produced by the LL process. The origin of shrinkage from photo-polymerisation is closely examined through the measurements along both the scanning and transversal directions.
引用
收藏
页码:887 / 891
页数:5
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