Impact of MEMS technology on society

被引：90

作者：

Bryzek, J

机构：

[1] Intelligent MicroSensor Technology, Fremont, CA 94539

来源：

SENSORS AND ACTUATORS A-PHYSICAL | 1996年 / 56卷 / 1-2期

关键词：

microelectromechanical systems; technology;

D O I：

10.1016/0924-4247(96)01284-8

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

One of the newest technologies receiving increased attention in recent years is silicon micromechanics, known in the USA as MEMS, or microelectromechanical systems. This paper briefly discusses the basic properties of silicon that make it attractive for MEMS. It then overviews the impact that MEMS technology has made on society by characterizing the evolution of the MEMS market. It follows with the growth forecast of the MEMS market for the next 10 years, pointing to several emerging billion dollar market opportunities. It finally characterizes the growth of MEMS in Silicon Valley, which with 32 commercial organizations currently active represents the world's most focused MEMS commercialization effort.

引用

页码：1 / 9

页数：9