Spatially resolved defect diagnostics in multicrystalline silicon for solar cells

被引:35
作者
Tarasov, I
Ostapenko, S
Haessler, C
Reisner, EU
机构
[1] Univ S Florida, Ctr Microelect Res, Tampa, FL 33620 USA
[2] Bayer AG, D-47812 Krefeld, Germany
来源
MATERIALS SCIENCE AND ENGINEERING B-SOLID STATE MATERIALS FOR ADVANCED TECHNOLOGY | 2000年 / 71卷
关键词
photoluminescence; dislocation; silicon; oxygen; lifetime; grain boundaries;
D O I
10.1016/S0921-5107(99)00348-7
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Scanning room temperature photoluminescence (PL) spectroscopy was applied to cast multicrystalline Si to assess the electronic properties of high-quality solar-grade material. The intensity of band-to-band emission with the maximum at 1.09 eV positively correlates with minority carrier lifetime measured concurrently using the laser-microwave reflection technique. A point-by-point mapping revealed the linear dependence of the band-to-band PL intensity and lifetime across entire multicrystalline-Si wafers. We have also found at room temperature an intense 'defect' PL band with the maximum at about 0.8 eV in wafer regions with a low band-to-band emission and degraded lifetime. The PL mapping of the 0.8 eV band intensity revealed a linkage to areas of a high dislocation density. Dislocation topography was obtained independently using light scattering technique and mapping the dislocation D-lines at 77 K. PL spectroscopy down to 4.2 K was performed at areas with high and low 'defect' band intensity. The origin of the 0.8 eV band is discussed in a connection with dislocations in multicrystalline Si. We demonstrate advantages of scanning room temperature PL spectroscopy for in-line diagnostics of Si-based materials. (C) 2000 Elsevier Science S.A. All rights reserved.
引用
收藏
页码:51 / 55
页数:5
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