Stereolithography of SiOC Ceramic Microcomponents

被引：419

作者：

Zanchetta, Erika ^{[1
,2
]}

Cattaldo, Marco ^{[1
,2
]}

Franchin, Giorgia ^{[1
,2
]}

Schwentenwein, Martin ^{[3
]}

Homa, Johannes ^{[3
]}

Brusatin, Giovanna ^{[1
,2
]}

Colombo, Paolo ^{[1
,2
,4
]}

机构：

[1] Univ Padua, Dept Ind Engn, I-35131 Padua, Italy

[2] Univ Padua, INSTM, I-35131 Padua, Italy

[3] Lithoz GmbH, A-1060 Vienna, Austria

[4] Penn State Univ, Dept Mat Sci & Engn, University Pk, PA 16802 USA

来源：

ADVANCED MATERIALS | 2016年 / 28卷 / 02期

关键词：

POLYMER-DERIVED CERAMICS; SILICON OXYCARBIDE GLASSES; 2-PHOTON POLYMERIZATION; SOFT LITHOGRAPHY; FABRICATION; PRECURSOR; MEMS; PHOTOPOLYMERIZATION; MICROFABRICATION; MICROSTRUCTURES;

D O I：

10.1002/adma.201503470

中图分类号：

O6 [化学];

学科分类号：

070301 [无机化学];

摘要：

The first example of the fabrication of complex 3D polymer-derived-ceramic structures is presented with micrometer-scale features by a 3D additive manufacturing (AM) technology, starting with a photosensitive preceramic precursor. Dense and crack-free silicon-oxycarbide-based microparts with features down to 200 μm are obtained after pyrolysis at 1000 C in a nitrogen atmosphere. © 2015 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim.

引用

页码：370 / 376

页数：7

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