Sol-gel synthesis of LaAlO3; Epitaxial growth of LaAlO3 thin films on SrTiO3 (100)

被引:34
作者
Shoup, SS [1 ]
Paranthaman, M [1 ]
Beach, DB [1 ]
Specht, ED [1 ]
Williams, RK [1 ]
机构
[1] OAK RIDGE NATL LAB,DIV MET & CERAM,OAK RIDGE,TN 37831
基金
美国能源部;
关键词
D O I
10.1557/JMR.1997.0142
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
A LaAlO3 precursor solution was prepared via an all alkoxide sol-gel route, The solution of lanthanum methoxyethoxide and aluminum methoxyethoxide in 2-methoxyethanol was prepared via ligand exchange starting from lanthanum isopropoxide and aluminum sec-butoxide and was used to make both LaAlO3 powders and films. Complete hydrolysis of the solution formed a gel that yielded well-crystallized LaAlO3 powders when fired in air at 800 degrees C. A partially hydrolyzed solution was spun-cast on SrTiO3 (100) single crystal substrates. Epitaxial films of LaAlO3 were subsequently formed during pyrolysis in O-2 at 800 degrees C in a rapid thermal annealing furnace for a total of 8 min. The films were strongly c-axis oriented, verified by x-ray rocking curve results from the (003) plane with full-width at half-maximum (FWHM) = 0.87 degrees, and had good in-plane texture shown by a phi scan of the (202) plane with FWHM = 1.07 degrees.
引用
收藏
页码:1017 / 1021
页数:5
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