Glow discharge optical spectroscopy depth profile analysis of conductive and nonconductive samples in a commercial service laboratory

被引：7

作者：

Asam, T ^{[1
]}

机构：

[1] TAZ GmbH, D-82229 Seefeld, Germany

来源：

SURFACE & COATINGS TECHNOLOGY | 1999年 / 116卷

关键词：

depth profile analysis; depth resolution; determination of CVD- and PVD-layers; glow discharge spectrometry;

D O I：

10.1016/S0257-8972(99)00231-5

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

The development of depth profile analysis by glow discharge spectrometry is reviewed. The principle of depth profiles of conductive and nonconductive samples is explained and the problems of the quantification model and calibration samples are explained. Some examples of depth profiles of conductive and nonconductive samples are shown. (C) 1999 Elsevier Science S.A. All rights reserved.

引用

页码：310 / 312

页数：3