Thin film growth by the pulsed laser assisted deposition technique

被引:34
作者
Belouet, C
机构
[1] Alcatel Alsthom Recherche, 91460 Marcoussis, route de Nozay
关键词
PLD; thin films; growth; laser-solid interaction;
D O I
10.1016/0169-4332(95)00535-8
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
摘要
Pulsed laser-assisted deposition (PLD) has recently emerged as a most promising film growth technique, at least for basic research, as this has been best demonstrated for high T-c superconducting oxides and YBa2Cu3O7-x in particular. This article briefly outlines the specific features of this technique and its potential, illustrated by the example of the growth of YBa2Cu3O7-x thin films aimed at the preparation of microwave passive devices. The perspectives of development of PLD and its ability to become an industrial process are discussed.
引用
收藏
页码:630 / 642
页数:13
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