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64x64, 128x128 and 240x320 pixel uncooled IR bolometric detector arrays
被引：13
作者：
Jerominek, H
Pope, TD
Renaud, M
Swart, NR
Picard, F
Lehoux, M
Savard, S
Bilodeau, G
Audet, D
Phong, LN
Qiu, CN
机构：
来源：
INFRARED TECHNOLOGY AND APPLICATIONS XXIII, PTS 1 AND 2
|
1997年
/
3061卷
关键词：
detector;
infrared;
uncooled;
bolometer;
micromachining;
vanadium dioxide;
D O I：
10.1117/12.280342
中图分类号：
O43 [光学];
学科分类号：
070207 ;
0803 ;
摘要：
Several prototypes of individual VO2-based bolometric detectors and their arrays consisting of 64x64, 128x128 and 240x320 pixels are presented. The fabrication method and the device characterization results are described. Three types of readout integrated circuits for the arrays are also presented. A custom vacuum package for the IR bolometric detector arrays is described.
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页码：236 / 247
页数：12
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