共 8 条
[1]
HOSOKAWA K, P MICR EL MECH SYST, P307
[2]
KATSURA S, 1999, IEEE IND APPL SOC AN
[3]
MOESNER FM, 1995, MICRO ELECTRO MECHANICAL SYSTEMS - IEEE PROCEEDINGS, 1995, P66, DOI 10.1109/MEMSYS.1995.472552
[4]
Nilsson S, 2000, MESA MG, P19
[5]
SAMMARCO TS, P MICR TOT AN SYST 9, P150
[6]
TORKKELI A, 2001, P IEEE INT C MICR EL
[7]
TORKKELI A, 2000, P TRANSD 01 EUR 15 I, P1150