CVD of Copper Oxides from a β-Diketonate Diamine Precursor: Tailoring the Nano-Organization

被引:70
作者
Barreca, Davide [1 ,2 ]
Gasparotto, Alberto [2 ]
Maccato, Chiara [2 ]
Tondello, Eugenio [2 ]
Lebedev, Oleg I. [3 ]
Van Tendeloo, Gustaaf [3 ]
机构
[1] Univ Padua, ISTM CNR, I-35131 Padua, Italy
[2] Univ Padua, INSTM, Dept Chem, I-35131 Padua, Italy
[3] Univ Antwerp, B-2020 Antwerp, Belgium
关键词
CHEMICAL-VAPOR-DEPOSITION; CRYSTALLINE CUO NANORODS; THIN-FILM GROWTH; STRUCTURAL-PROPERTIES; REACTION-MECHANISMS; ELECTRODE MATERIALS; FACILE SYNTHESIS; HIGHLY VOLATILE; ANODE MATERIALS; CU2O;
D O I
10.1021/cg801378x
中图分类号
O6 [化学];
学科分类号
0703 ;
摘要
A copper(II) hexafluoroacetylacetonate (1,1,1,5,5,5-hexafluoro-2,4-pentanedionate, hfa) adduct with N,N,N',N'-tetramethylethylenediamine (TMEDA) [Cu(hfa)(2) center dot TMEDA] is used for the first time as precursor for the chemical vapor deposition (CVD) of copper oxide nanosystems. The syntheses are carried out under both O-2 and O-2+H2O reaction atmospheres on Si(100) substrates, at temperatures ranging between 250 and 550 degrees C. Subsequently, the interrelations between the preparative conditions and the system composition, nanostructure, and morphology are elucidated by means of complementary analytical techniques [Fourier transform infrared spectroscopy (FT-IR), X-ray photoelectron and X-ray excited auger electron spectroscopies (XPS and XE-AES), glancing incidence X-ray diffraction (GIXRD), field emission scanning electron microscopy (FESEM), transmission electron microscopy (TEM)]. The obtained data revealed a gradual transformation from Cu2O, to Cu2O + CuO, to CuO nanosystems upon increasing the deposition temperature from 250 to 550 degrees C under both growth atmospheres. Such a phenomenon was accompanied by a progressive morphological evolution from continuous films to 1D hyperbranched nanostructures. Water vapor introduction in the deposition environment enabled to lower the deposition temperature and resulted in a higher aggregate interconnection, attributed to a higher density of nucleation centers.
引用
收藏
页码:2470 / 2480
页数:11
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