Catalyst combustors with B-Doped SiGe/Au thermopile for micro-power-generation

被引：8

作者：

Nishibori, Maiko ^{[1
]}

Shin, Woosuck ^{[1
]}

Tajima, Kazuki ^{[1
]}

Houlet, Lionel F. ^{[1
]}

Izu, Noriya ^{[1
]}

Matsubara, Ichiro ^{[1
]}

Murayama, Norimitsu ^{[1
]}

机构：

[1] Natl Inst Adv Ind Sci & Technol, AIST, Nagoya, Aichi 4638560, Japan

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS & EXPRESS LETTERS | 2006年 / 45卷 / 42-45期

关键词：

thermoelectric; micro-power-generation; thermopile; SiGe; catalyst combustor;

D O I：

10.1143/JJAP.45.L1130

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

A micromachined thermoelectric (TE) power generator with a ceramic catalyst combustor operating at room temperature (RT) has been developed. A thermopile of 20 thin-film couples of B-doped Si0.8Ge0.2/Au and a Pt-loaded alumina ceramic thick-film catalyst combustor were integrated on a thin dielectric membrane, which was fabricated by bulk-Si wet etching. We have demonstrated a successful power generation of 0.26 mu W using the micro-TE-generator with a fuel gas flow of 3 vol. % H-2 in air, 1000 ccm, at RT.

引用

页码：L1130 / L1132

页数：3

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