High-Performance Zinc Oxide Transistors and Circuits Fabricated by Spray Pyrolysis in Ambient Atmosphere

被引:188
作者
Bashir, Aneeqa [1 ]
Woebkenberg, Paul H. [1 ]
Smith, Jeremy [1 ]
Ball, James M. [1 ]
Adamopoulos, George [1 ]
Bradley, Donal D. C. [1 ]
Anthopoulos, Thomas D. [1 ]
机构
[1] Univ London Imperial Coll Sci Technol & Med, Dept Phys, Blackett Lab, London SW7 2BW, England
基金
英国工程与自然科学研究理事会;
关键词
THIN-FILM TRANSISTORS; ROOM-TEMPERATURE; COMPLEMENTARY CIRCUITS; ELECTRICAL-PROPERTIES; TRANSPARENT; ZNO; SEMICONDUCTORS; DEPOSITION; ELECTRONICS; NANORODS;
D O I
10.1002/adma.200803584
中图分类号
O6 [化学];
学科分类号
0703 ;
摘要
The use of a simple deposition technique, namely spray pyrolysis, for the fabrication of high-mobility, low-voltage ZnO transistors and simple integrated circuits is demonstrated. The method is compatible with large-area deposition and could potentially address both the issue of manufacturing cost and high operating voltages.
引用
收藏
页码:2226 / +
页数:7
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