Structure and interaction of organic/inorganic hybrid nanocomposites for microelectronic applications.: 1.: MSSQ/P(MMA-co-DMAEMA) nanocomposites

被引:87
作者
Huang, QR
Volksen, W
Huang, E
Toney, M
Frank, CW
Miller, RD [1 ]
机构
[1] Stanford Univ, Dept Chem Engn, Stanford, CA 94305 USA
[2] IBM Corp, Almaden Res Ctr, San Jose, CA 95120 USA
[3] IBM Corp, Thomas J Watson Res Ctr, Yorktown Hts, NY 10598 USA
关键词
D O I
10.1021/cm020014z
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
摘要
Nanoporous methyl silsesquioxane (MSSQ), which is an important and promising candidate for spin-on ultralow dielectric constant applications, has been produced Via the thermosetting of MSSQ, templated by a nanodispersed, thermally decomposable pore generator (porogen)poly(methyl methacrylate-co-dimethylaminoothyl methacrylate) [P(MMA-co-DMAEMA)]. Fourier transform infrared spectroscopy is used to study the interaction and structural changes of MSSQ/P(MMA-co-DMAEMA) nanocomposites as a function of curing temperature (ranging from 25 to 450 degreesC) and porogen loading (ranging from 0 to 70 wt %). We find that strong hydrogen-bonding interactions occur between the -OH end groups in MSSQ and the tertiary amino groups in P(MMA-co-DMAEMA) in films at 25 degreesC. An increase in cure temperature from 25 to 250 degreesC and finally to 450 degreesC transforms MSSQ from a material with many reactive end groups to a highly cross-linked structure. In addition, the amino substituent in P(MMA-co-DMAEMA) can act as a catalyst for the condensation and cross-linking of MSSQ. An increase of porogen loading to 70 wt % and a decrease in the silanol group concentration in MSSQ both hinder the formation of the -Si-O-Si- network. Finally, small-angle X-ray scattering (SAXS) results indicate that MSSQ resins initially having higher -OH end group concentrations ultimately generate smaller pores after the removal of porogens.
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页码:3676 / 3685
页数:10
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