The influence of Young's modulus on roundness in silicon sphere fabrication

被引：13

作者：

Collins, JG

Giardini, WJ

Leistner, AJ

Kenny, MJ

机构：

[1] CSIRO, Division of Telecommunications and Industrial Physics, National Measurement Laboratory, Lindfield

来源：

IEEE TRANSACTIONS ON INSTRUMENTATION AND MEASUREMENT | 1997年 / 46卷 / 02期

关键词：

avogadro constant; polishing; roundness; silicon crystal spheres; young's modulus;

D O I：

10.1109/19.571918

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

Silicon single-crystal spheres for use in accurate determination of the Avogadro constant are fabricated by optical grinding and polishing, Surface profiling of the deviation from sphericity of the spheres shows a strong cubic symmetry on the scale of (20 to 40) nm, which is well correlated with the orientation of the silicon crystal axes and sets a limit on the ultimate shape that can be obtained, This deviation from sphericity can be explained in terms of the variation of Young's modulus with crystal orientation.

引用

页码：572 / 575

页数：4

共 7 条

[1] A REALIZATION OF THE SI WATT BY THE NPL MOVING-COIL BALANCE [J].