Laser-induced microexplosion confined in a bulk of silica: Formation of nanovoids

被引:111
作者
Juodkazis, Saulius
Misawa, Hiroaki
Hashimoto, Tomohiro
Gamaly, Eugene G.
Luther-Davies, Barry
机构
[1] Hokkaido Univ, CREST, JST, Kita Ku, Sapporo, Hokkaido 0010021, Japan
[2] Hokkaido Univ, Res Inst Elect Sci, Kita Ku, Sapporo, Hokkaido 0010021, Japan
[3] Ohara Inc, Sagamihara, Kanagawa 2291186, Japan
[4] Australian Natl Univ, Res Sch Phys Sci & Engn, Laser Phys Ctr, Canberra, ACT 0200, Australia
关键词
D O I
10.1063/1.2204847
中图分类号
O59 [应用物理学];
学科分类号
摘要
We report on the nanovoid formation inside synthetic silica, viosil, by single femtosecond pulses of 30-100 nJ energy, 800 nm wavelength, and 180 fs duration. It is demonstrated that the void is formed as a result of shock and rarefaction waves at pulse power much lower than the threshold of self-focusing. The shock-compressed region around the nanovoid is demonstrated to have higher chemical reactivity. This was used to reveal the extent of the shock-compressed region by wet etching. Application potential of nanostructuring of dielectrics is discussed. (c) 2006 American Institute of Physics.
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页数:3
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