Three dimensional analysis of machined surfaces by scatterometry

The analysis of scattered light is a well known method for the inspection of very smooth surfaces. Some new methods of data analysis have now widened its utilization to rough and very rough surfaces. Even if no generalized solution is available it is possible to determine any surface parameter in certain applications. Especially for process control purposes, scatterometry can be a fast, contactless and reliable method to measure deviations from rated values and to detect machining errors. In this paper, the method and its application to honed, polished and turned surfaces are presented. Amplitude as well as spatial parameters of the surfaces microtopography will be determined and compared to those obtained by other methods.