Energy and particle fluxes in PLD processes

被引：14

作者：

Lenk, A ^{[1
]}

Schultrich, B ^{[1
]}

Witke, T ^{[1
]}

Weiss, HJ ^{[1
]}

机构：

[1] IWS DRESDEN, FRAUNHOFER INST WERKSTOFFPHYS & SCHICHTTECHNOL, D-01277 DRESDEN, GERMANY

来源：

APPLIED SURFACE SCIENCE | 1997年 / 109卷

关键词：

D O I：

10.1016/S0169-4332(96)00775-1

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

The main advantage of the PLD process consists in thin film deposition by a plasma flow with high kinetic particle energy. The energy and mass balance of the particle beam formation generated by laser ablation is the key for qualitative and quantitative understanding of the fundamental processes. Thermal evaporation and inverse bremsstrahlung will be discussed in this context. For experimental estimation of the energy and mass balance several in-situ measuring systems have been installed, in particular the ballistic microbalance and electrical probes. As a representative example the ablation of aluminium and carbon by pulsed Nd:YAG laser irradiation in the intensity range of 10(8) W/cm(2) is presented in more detail.

引用

页码：419 / 423

页数：5

共 5 条

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[3]

LENK A, 1996, THESIS TU DRESDEN

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[5]

WITKE T, 1996, THESIS TU DRESDEN

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