Experimental study of fullerene-family formation using radio-frequency-discharge reactive plasmas

被引:19
作者
Ishida, H [1 ]
Satake, N
Jeong, GH
Abe, Y
Hirata, T
Hatakeyama, R
Tohji, K
Motomiya, K
机构
[1] Tohoku Univ, Dept Elect Engn, Sendai, Miyagi 9808579, Japan
[2] Tohoku Univ, Dept Geosci & Technol, Sendai, Miyagi 9808579, Japan
关键词
fullerene; carbon nanotube; radio-frequency glow discharge; reactive plasma;
D O I
10.1016/S0040-6090(02)00007-X
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
A formation regime of fullerenes and carbon nanotubes in glow-discharge reactive plasmas is investigated in order to gain sharp insight into the relation between plasma characteristics and the generation processes of the fullerene families. The plasma is produced in a mixture of CH4 and a small fraction of H-2 by the radio-frequency (RF) discharge across an externally-applied magnetic field. The plasma is found to be apparently localized around the RF electrode under certain conditions determined by the magnetic field strength and reactive-gas pressure. In this case, it is demonstrated that fullerenes and carbon nanotubes are most effectively generated on the RF electrode, which is negatively self-biased, and exposed to a strong plasma-sheath drop. Our results indicate that the creation of radical species, such as hydrocarbon precursors, due to the local discharge around the RF electrode, the sheath acceleration of positively-charged particles such as carbon ions, and the abstraction of the hydrogen from hydrogenated-carbon species or clusters, are important in the nucleation, formation, and growth of the fullerene families. (C) 2002 Elsevier Science B.V. All rights reserved.
引用
收藏
页码:26 / 31
页数:6
相关论文
共 16 条
[1]   Plasma-induced alignment of carbon nanotubes [J].
Bower, C ;
Zhu, W ;
Jin, SH ;
Zhou, O .
APPLIED PHYSICS LETTERS, 2000, 77 (06) :830-832
[2]   Fullerene-like carbon nanoparticles generated by radio-frequency plasma-enhanced chemical vapour deposition [J].
Burden, AP ;
Silva, SRP .
PHILOSOPHICAL MAGAZINE LETTERS, 1998, 78 (01) :15-19
[3]   Fullerene and nanotube formation in cool terrestrial "dusty plasmas" [J].
Burden, AP ;
Silva, SRP .
APPLIED PHYSICS LETTERS, 1998, 73 (21) :3082-3084
[4]   New method of carbon onion growth by radio-frequency plasma-enhanced chemical vapor deposition [J].
Chen, XH ;
Deng, FM ;
Wang, JX ;
Yang, HS ;
Wu, GT ;
Zhang, XB ;
Peng, JC ;
Li, WZ .
CHEMICAL PHYSICS LETTERS, 2001, 336 (3-4) :201-204
[5]   Field emission of different oriented carbon nanotubes [J].
Chen, Y ;
Shaw, DT ;
Guo, LP .
APPLIED PHYSICS LETTERS, 2000, 76 (17) :2469-2471
[6]   FULLERENE FORMATION DURING PRODUCTION OF CHEMICAL-VAPOR-DEPOSITED DIAMOND [J].
CHOW, L ;
WANG, H ;
KLECKLEY, S ;
DALY, TK ;
BUSECK, PR .
APPLIED PHYSICS LETTERS, 1995, 66 (04) :430-432
[7]   Novel plasma chemical vapor deposition method of carbon nanotubes at low temperature for field emission display application [J].
Chung, SJ ;
Lim, SH ;
Lee, CH ;
Jang, J .
DIAMOND AND RELATED MATERIALS, 2001, 10 (02) :248-253
[8]   CATALYTIC GROWTH OF SINGLE-WALLED NANOTUBES BY LASER VAPORIZATION [J].
GUO, T ;
NIKOLAEV, P ;
THESS, A ;
COLBERT, DT ;
SMALLEY, RE .
CHEMICAL PHYSICS LETTERS, 1995, 243 (1-2) :49-54
[9]  
HAUFLER RE, 1991, MATER RES SOC SYMP P, V206, P627, DOI 10.1557/PROC-206-627
[10]   Synthesis of well-aligned multiwalled carbon nanotubes on Ni catalyst using radio frequency plasma-enhanced chemical vapor deposition [J].
Ho, GW ;
Wee, ATS ;
Lin, J ;
Tjiu, WC .
THIN SOLID FILMS, 2001, 388 (1-2) :73-77