An integrated force-balanced capacitive accelerometer for low-g applications

被引：109

作者：

Chau, KHL ^{[1
]}

Lewis, SR ^{[1
]}

Zhao, Y ^{[1
]}

Howe, RT ^{[1
]}

Bart, SF ^{[1
]}

Marcheselli, RG ^{[1
]}

机构：

[1] UNIV CALIF BERKELEY,BERKELEY SENSOR & ACTUATOR CTR,BERKELEY,CA 94720

来源：

SENSORS AND ACTUATORS A-PHYSICAL | 1996年 / 54卷 / 1-3期

关键词：

accelerometers; integrated sensors; capacitive sensors; force-balanced sensors; surface micromachining;

D O I：

10.1016/S0924-4247(97)80006-4

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

A low-cost monolithic accelerometer which incorporates a surface-micromachined polysilicon sensor with bipolar/MOS interface circuitry on a simple chip has been developed for a measurement range of +/- 5g. The accelerometer has a noise floor of 0.6 mg (Hz)(-1/2) and a shock survival rating or 1000g. A sensitivity temperature coefficient of +/- 50 ppm degrees C-1 and an offset temperature coefficient of +/- 5 mg degrees C-1 have been achieved over the - 40 to + 105 degrees C automotive temperature range, A wide bandwidth from d.c, to 4 kHz is adjustable using a single external capacitor. The accelerometer operates on a single 5 V power supply and consumes 40 mW of power. It provides an analog output of 200 mV g(-1) and a digitally activated self-test output of - 5g.

引用

页码：472 / 476

页数：5