An integrated force-balanced capacitive accelerometer for low-g applications

被引:109
作者
Chau, KHL [1 ]
Lewis, SR [1 ]
Zhao, Y [1 ]
Howe, RT [1 ]
Bart, SF [1 ]
Marcheselli, RG [1 ]
机构
[1] UNIV CALIF BERKELEY,BERKELEY SENSOR & ACTUATOR CTR,BERKELEY,CA 94720
关键词
accelerometers; integrated sensors; capacitive sensors; force-balanced sensors; surface micromachining;
D O I
10.1016/S0924-4247(97)80006-4
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
A low-cost monolithic accelerometer which incorporates a surface-micromachined polysilicon sensor with bipolar/MOS interface circuitry on a simple chip has been developed for a measurement range of +/- 5g. The accelerometer has a noise floor of 0.6 mg (Hz)(-1/2) and a shock survival rating or 1000g. A sensitivity temperature coefficient of +/- 50 ppm degrees C-1 and an offset temperature coefficient of +/- 5 mg degrees C-1 have been achieved over the - 40 to + 105 degrees C automotive temperature range, A wide bandwidth from d.c, to 4 kHz is adjustable using a single external capacitor. The accelerometer operates on a single 5 V power supply and consumes 40 mW of power. It provides an analog output of 200 mV g(-1) and a digitally activated self-test output of - 5g.
引用
收藏
页码:472 / 476
页数:5
相关论文
共 6 条
[1]  
BART S, 1995, P IEEE INT REL PHYS
[2]  
CORE TA, 1993, SOLID STATE TECH OCT, P39
[3]   MECHANICAL-THERMAL NOISE IN MICROMACHINED ACOUSTIC AND VIBRATION SENSORS [J].
GABRIELSON, TB .
IEEE TRANSACTIONS ON ELECTRON DEVICES, 1993, 40 (05) :903-909
[4]  
LU C, 1995, TECH DIGEST INT SOLI
[5]  
SHERMAN SJ, 1992, TECH DIGEST IEDM SAN
[6]  
YUN W, 1992, TECH DIGEST IEEE SOL