CCD-based CMM geometrical error measurement using Fourier phase shift algorithm

A precision multi-degree-of-freedom measuring (MDFM) system based on CCD has been developed and implemented for the simultaneous measurement of straightness, pitch, yaw and roll errors of the moving axis of CMM. The Fourier phase shift algorithm (FPS) in conjunction with two-dimensional CCD replaces the quadrant photo-diode used in position sensing detector (PSD)-based MDFM which was proposed by Ni et al. (ASME J. Engng Ind. 114, 362, 1992 [1]). The submicron and subarcsec accuracy of the CCD-based MDFM system was achieved experimentally, In comparison with the PSD-based MDFM, the proposed CCD-based MDFM shows the advantages of a longer working distance, better background noise resistance and a simpler configuration. (C) 1997 Elsevier Science Ltd.