Low propagation loss of 0.76 dB/mm in GaAs-based single-line-defect two-dimensional photonic crystal slab waveguides up to 1 cm in length

被引：142

作者：

Sugimoto, Y ^{[1
]}

Tanaka, Y

Ikeda, N

Nakamura, Y

Asakawa, K

Inoue, K

机构：

[1] Femtosecond Technol Res Assoc, Tsukuba, Ibaraki 3002635, Japan

[2] Chitose Inst Sci & Technol, Chitose 0668655, Japan

来源：

OPTICS EXPRESS | 2004年 / 12卷 / 06期

关键词：

Photonic integrated circuits - Photonic-crystals;

D O I：

10.1364/OPEX.12.001090

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

Straight single-line-defect photonic crystal (PC) waveguides on GaAs slabs with lengths of 1, 4, and 10 mm have been fabricated. By controlling the Al content of a sacrificial AlGaAs clad layer and the wet etching duration, a PC core layer with a very smooth surface was obtained. Atomic force microscope images indicate that the roughness on the top surface is less than 1 nm. An extremely low propagation loss of 0.76 dB/mm for the GaAs-based PC waveguide was achieved. (C) 2004 Optical Society of America.

引用

页码：1090 / 1096

页数：7

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