Highly sensitive Al0.25Ga0.75As/In0.25Ga0.75As/GaAs quantum-well Hall devices with Si-delta-doped GaAs layer grown by LP-MOCVD

被引:15
作者
Lee, JS [1 ]
Ahn, KH [1 ]
Jeong, YH [1 ]
Kim, DM [1 ]
机构
[1] POHANG UNIV SCI & TECHNOL,DEPT ELECT & ELECT ENGN,NAM KU,POHANG 790784,KYUNGBUK,SOUTH KOREA
关键词
quantum-well Hall devices; Si-delta-doping; low-pressure metal organic chemical vapour deposition (LP-MOCVD);
D O I
10.1016/S0924-4247(97)80112-4
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
Quantum-well Hall devices based on Si-delta-doped Al0.25Ga0.2As/In0.25Ga0.75As/GaAs pseudomorphic heterostructure materials grown by the low-pressure metal organic chemical vapour deposition (LP-MOCVD) method have been successfully fabricated. A Si-delta-doped GaAs layer is introduced for the first time in the Hall device to reduce the thermal variation of electron concentrations and to improve its temperature characteristics. A high electron mobility of 8100 cm(2) V-1 s(-1) with a sheet carrier density of 1.5 X 10(12) cm(-2) has been achieved at room temperature. A temperature coefficient of - 0.015% K-1 with a product sensitivity of 420 V A(-1) T-1 has been obtained. High signal-to-noise (S/N) ratios corresponding to minimum detectable magnetic fields (B-min) of 60 nT at 1 kHz and 110 nT at 100 Hz have been attained due to the reduced low-frequency noise from DX centres and the high mobility, These data belong to one of the best reported results.
引用
收藏
页码:183 / 185
页数:3
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