Modeling of femtosecond laser-induced non-equilibrium deformation in metal films

被引:124
作者
Chen, JK [1 ]
Beraun, JE
Grimes, LE
Tzou, DY
机构
[1] USAF, Laser Effects Res Branch, Directed Energy Directorate, Res Lab, Kirtland AFB, NM 87117 USA
[2] Univ Missouri, Dept Mech & Aerosp Engn, Columbia, MO 65211 USA
关键词
femtosecond lasers; ultrashort laser-material ablation; ultrafast thermomechanics; two-step heating process; hot-electron blast force; metal films; non-thermal damage;
D O I
10.1016/S0020-7683(02)00242-1
中图分类号
O3 [力学];
学科分类号
08 ; 0801 ;
摘要
This paper extends the dual-hyperbolic two temperature (Numer. Heat Transfer Part A 40 (2001) 1) and hot-electron blast (J. Exp. Theor. Phys. 88 (1999) 84) models to investigate the deformation in metal films subjected to ultrashort laser heating. A new set of fully coupled, transient thermoelasticity equations is derived based on the assumption of uniaxial strain but three-dimensional stress. Two potential material removal mechanisms, thermal (melting) and non-thermal (high stress), are identified. Numerical results show that the non-thermal damage could be a dominating mechanism in ultrashort laser-material ablation. The major driving force for the non-thermal damage is the so-called hot-electron blast force, which is generated by non-equilibrium hot electrons. It is also found that for gold films thicker than 200 nm, a thin layer of material near the heated surface could be removed, as experimentally observed (Opt. Cummun. 129 (1996) 134; J. Appl. Phys. 85 (1999) 6803). On the other hand, damage could initiate from the middle region and then extend over the entire film for a gold film of 50 nm in thickness or thinner. (C) 2002 Elsevier Science Ltd. All rights reserved.
引用
收藏
页码:3199 / 3216
页数:18
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