Electrical characterization of SrBi2Ta2O9 capacitors for non-volatile memory operation

被引:5
作者
Amanuma, K
Kunio, T
机构
[1] Microlectron. Research Laboratories, NEC Corporation, Sagamihara 229
关键词
D O I
10.1080/10584589708013039
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
Pulse response of SrBi2Ta2O9 capacitors was measured for large-scale non-volatile memory design. Pulse response depended on capacitor size, while such a dependence was not observed in hysteresis measurement. As the reference capacitor in the Sawyer-Tower circuit decrease, the signal voltage This result suggests small bit-line capacitor is preferable for memory design. The possibility of very low-voltage operation was indicated.
引用
收藏
页码:175 / 182
页数:8
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