Study of structure and optical properties of silver oxide films by ellipsometry, XRD and XPS methods

被引：197

作者：

Gao, XY ^{[1
]}

Wang, SY ^{[1
]}

Li, J ^{[1
]}

Zheng, YX ^{[1
]}

Zhang, RJ ^{[1
]}

Zhou, P ^{[1
]}

Yang, YM ^{[1
]}

Chen, LY ^{[1
]}

机构：

[1] Fudan Univ, Dept Opt Sci & Engn, State Key Lab Adv Photon Devices & Mat, Shanghai 200433, Peoples R China

来源：

THIN SOLID FILMS | 2004年 / 455卷

关键词：

ellipsometry; thin film; AgxO film;

D O I：

10.1016/j.tsf.2003.11.242

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

AgxO samples prepared in different O-2 gas ratio conditions and annealed at different temperatures have been studied by the spectroscopic ellipsometry, XRD and XPS methods. The optimal O-2/(O-2 + Ar) gas ratio for the sample preparation will be in the range 0.5-0.6, in which the optical constants become less changed. During annealing, the as-deposited amorphous structure of AgxO will be crystallized and the temperature-dependent decomposition will occur. The threshold of the decomposition temperature for AgO and Ag2O is approximately 200 degreesC and 300 degreesC, respectively. The results indicate that the samples annealed at the low and high O-2/(O-2+Ar) gas ratio will have different structures, and the structure of Ag2O is more stable with a lower oxygen diffusion rate in decomposition for the sample prepared in the higher O-2 gas ratio condition. (C) 2003 Elsevier B.V. All rights reserved.

引用

页码：438 / 442

页数：5

共 10 条

[1] DESIGN OF A SCANNING ELLIPSOMETER BY SYNCHRONOUS ROTATION OF THE POLARIZER AND ANALYZER [J].