Incoherent superposition in ellipsometric measurements

被引：36

作者：

Forcht, K

Gombert, A

Joerger, R

Kohl, M

机构：

[1] Fraunhofer Inst. Solar Ener. S., Dept. for Thermal and Optical Syst., Oltmannsstraße 5

来源：

THIN SOLID FILMS | 1997年 / 302卷 / 1-2期

关键词：

depolarization; incoherent superposition; spectroscopic ellipsometry; transmission ellipsometry;

D O I：

10.1016/S0040-6090(96)09555-7

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

A relationship between Jones and Mueller matrices originally derived for random media is applied to incoherence effects in photometric ellipsometry. Such effects are for example depolarization after reflection from a sample with varying film thickness or from a layer which is thicker than the coherence length of the incident light. The main task is to calculate the expectation value of a statistical ensemble. For the important case of thick layers, this expectation value is derived in a symbolic form. Results calculated with this method for transmission ellipsometry, ellipsometry at the back surface of the substrate and the determination of the optical constants at the substrate-layer interface are compared with measurements. (C) 1997 Elsevier Science S.A.

引用

页码：43 / 50

页数：8

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