Effect of deposition parameters on Li2B4O7 thin films morphology prepared by ''PYROSOL'' process

被引：4

作者：

Bornand, V ^{[1
]}

ElBouchikhi, A ^{[1
]}

Papet, P ^{[1
]}

Philippot, E ^{[1
]}

机构：

[1] FAC SCI,LAB ETAT SOLIDE,KENITRA,MOROCCO

来源：

JOURNAL DE PHYSIQUE III | 1997年 / 7卷 / 04期

关键词：

D O I：

10.1051/jp3:1997161

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Li2B4O7 piezo-electric thin films were prepared by ''PYROSOL'' process which is a useful method for the elaboration of thin films. Morphological development and crystallization of thin films are very dependent on the experimental parameters like the substrate temperature, the concentration and the relative proportion of the precursors in methyl alcohol. The effect of these various parameters were studied in order to obtain homogeneous, crystallized and oriented thin films.

引用

页码：853 / 865

页数：13

共 15 条

[1]

Adachi M., 1985, IEEE 1985 Ultrasonics Symposium. Proceedings. (Cat. No.85CH2209-5), P228

[2]

BALLATO A, 1989, NEW MAT

[3]

COURT M, 1985, VIDE COUCHES MINCES, V60, P309

[4]

DEKEIJSER M, 1995, J CRYST GROWTH, V149, P215, DOI 10.1016/0022-0248(95)00045-3

[5] MATERIALS FOR FILTERING AND FREQUENCY CONTROL IN THE NEXT GENERATIONS OF MOBILE COMMUNICATION-SYSTEMS [J].

DETAINT, J ;

SCHWARTZEL, J .

JOURNAL DE PHYSIQUE IV, 1994, 4 (C2) :93-106

[6]

ElBouchikhi A, 1995, THIN SOLID FILMS, V268, P13, DOI 10.1016/0040-6090(95)06760-4

[7]

FAN SJ, 1993, IEEE INT FREQ CONTR, P353

[8]

KOSINSKI JA, 1993, NEW ACOUSTOELECTRONI

[9] CRYSTAL STRUCTURE OF LITHIUM DIBORATE, LI2O.2B2O3 [J].

KROGHMOE, J .

ACTA CRYSTALLOGRAPHICA, 1962, 15 (03) :190-&

[10]

NATARAJAN M, 1979, CRYST STRUCT COMMUN, V8, P367

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