Fabrication of high aspect ratio 100 nm metallic stamps for nanoimprint lithography using proton beam writing

被引:95
作者
Ansari, K [1 ]
van Kan, JA [1 ]
Bettiol, AA [1 ]
Watt, F [1 ]
机构
[1] Natl Univ Singapore, Dept Phys, Ctr Ion Beam Applicat, Singapore 117542, Singapore
关键词
D O I
10.1063/1.1773933
中图分类号
O59 [应用物理学];
学科分类号
摘要
We report a way of fabricating high-quality void-free high-aspect-ratio metallic stamps of 100 nm width and 2 mum depth, using the technique of proton beam writing coupled with electroplating using a nickel sulfamate solution. Proton beam writing is a one-step direct-write process with the ability to fabricate nanostructures with high-aspect-ratio vertical walls and smooth sides, and as such has ideal characteristics for three-dimensional (3D) stamp fabrication. Nanoindentation and atomic force microscopy measurements of the nickel surfaces of the fabricated stamp show a hardness and side-wall roughness of 5 GPa and 7 nm, respectively. The fabricated 100 nm 3D stamps have been used to transfer test patterns into poly(methylmethacrylate) films, spin coated onto a silicon substrate. Proton beam writing coupled with electroplating offers a process of high potential for the fabrication of high quality metallic 3D nanostamps. (C) 2004 American Institute of Physics.
引用
收藏
页码:476 / 478
页数:3
相关论文
共 18 条
  • [1] IMPRINT OF SUB-25 NM VIAS AND TRENCHES IN POLYMERS
    CHOU, SY
    KRAUSS, PR
    RENSTROM, PJ
    [J]. APPLIED PHYSICS LETTERS, 1995, 67 (21) : 3114 - 3116
  • [2] Material characterisation of electroplated nickel structures for microsystem technology
    Fritz, T
    Mokwa, W
    Schnakenberg, U
    [J]. ELECTROCHIMICA ACTA, 2001, 47 (1-2) : 55 - 60
  • [3] Enhanced adhesion of PMMA to copper with black oxide for electrodeposition of high aspect ratio nickel-iron microstructures
    Kanigicherla, VKP
    Kelly, KW
    Ma, E
    Wang, W
    Murphy, MC
    [J]. MICROSYSTEM TECHNOLOGIES, 1998, 4 (02) : 77 - 81
  • [4] POLYMER MICROSTRUCTURES FORMED BY MOLDING IN CAPILLARIES
    KIM, E
    XIA, YN
    WHITESIDES, GM
    [J]. NATURE, 1995, 376 (6541) : 581 - 584
  • [5] FEATURES OF GOLD HAVING MICROMETER TO CENTIMETER DIMENSIONS CAN BE FORMED THROUGH A COMBINATION OF STAMPING WITH AN ELASTOMERIC STAMP AND AN ALKANETHIOL INK FOLLOWED BY CHEMICAL ETCHING
    KUMAR, A
    WHITESIDES, GM
    [J]. APPLIED PHYSICS LETTERS, 1993, 63 (14) : 2002 - 2004
  • [6] SCHAFFER E, 2000, NATURE, V403, P24
  • [7] Patterning of polymer-supported metal films by microcutting
    Stutzmann, N
    Tervoort, TA
    Bastiaansen, K
    Smith, P
    [J]. NATURE, 2000, 407 (6804) : 613 - 616
  • [8] van Kan JA, 2003, MATER RES SOC SYMP P, V777, P79
  • [9] Three-dimensional nanolithography using proton beam writing
    van Kan, JA
    Bettiol, AA
    Watt, F
    [J]. APPLIED PHYSICS LETTERS, 2003, 83 (08) : 1629 - 1631
  • [10] High precision 3D metallic microstructures produced using proton beam micromachining
    van Kan, JA
    Bettiol, AA
    Watt, F
    [J]. NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 2001, 181 : 258 - 262