A micromachined electret-based transponder for in situ radiation measurement

被引：10

作者：

Son, Chulwoo ^{[1
]}

Ziaie, Babak ^{[1
]}

机构：

[1] Purdue Univ, Sch Elect & Comp Engn, W Lafayette, IN 47907 USA

来源：

IEEE ELECTRON DEVICE LETTERS | 2006年 / 27卷 / 11期

基金：

美国国家科学基金会;

关键词：

capacitive sensor; dosimeter; microelectro-mechanical system (MEMS); microtransponder;

D O I：

10.1109/LED.2006.884717

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

This letter reports on the development of a micromachined passive transponder for in situ measurement of ionizing radiation. gamma-ray exposure is remotely measured by monitoring the resonance frequency change correlated with a change in the surface charge of an electret. This is achieved through a micromachined capacitor with a movable plate that is partially filled with a Teflon electret and connected in parallel with an inductor, forming a passive LC tank (a microionization chamber, 1.5 cm in diameter and 3 mm in thickness). Test results show that an exposure of 60 000 R from Cs-137 produces a 687-kHz resonance frequency shift (sensitivity of 11.45 kHz/kR).

引用

页码：884 / 886

页数：3

共 12 条

[1] A wireless batch sealed absolute capacitive pressure sensor [J].

Akar, O ;

Akin, T ;

Najafi, K .

SENSORS AND ACTUATORS A-PHYSICAL, 2001, 95 (01) :29-38

[2]

Attix F. H., 1986, INTRO RADIOLOGICAL P, P1

[3]

GREENING JR, 1985, FUNDAMENTALS RAD DOS, P1

[4]

KNOLL GF, 1989, RAD DETECTION MEASUR, P103

[5] Space-charge electrets [J].

Kressmann, R ;

Sessler, GM ;

Gunther, P .

IEEE TRANSACTIONS ON DIELECTRICS AND ELECTRICAL INSULATION, 1996, 3 (05) :607-623

[6] Kelvin probe force microscopy on corona charged oxidized semiconductor surfaces [J].

Lägel, B ;

Ayala, MD ;

Schlaf, R .

APPLIED PHYSICS LETTERS, 2004, 85 (20) :4801-4803

[7] Initial clinical results of an in vivo dosimeter during external beam radiation therapy [J].

Scarantino, CW ;

Rini, CJ ;

Aquino, M ;

Carrea, TB ;

Ornitz, RD ;

Anscher, MS ;

Black, RD .

INTERNATIONAL JOURNAL OF RADIATION ONCOLOGY BIOLOGY PHYSICS, 2005, 62 (02) :606-613

[8] An implantable radiation dosimeter for use in external beam radiation therapy [J].

Scarantino, CW ;

Ruslander, DM ;

Rini, CJ ;

Mann, GG ;

Nagle, HT ;

Black, RD .

MEDICAL PHYSICS, 2004, 31 (09) :2658-2671

[9]

SESSLER GM, 1980, ELECTRETS, V33, P13

[10] Low dose ionizing radiation detection using conjugated polymers [J].

Silva, EAB ;

Borin, JF ;

Nicolucci, P ;

Graeff, CFO ;

Netto, TG ;

Bianchi, RF .

APPLIED PHYSICS LETTERS, 2005, 86 (13) :1-3

← 1 2 →