Post-implantation of ions into amorphous carbon films

被引：4

作者：

Kolitsch, A

Summchen, L

Ullmann, J

Falke, U

Heger, P

机构：

[1] TECH UNIV DRESDEN,INST ANALYT CHEM,D-01069 DRESDEN,GERMANY

[2] TECH UNIV CHEMNITZ ZWICKOU,INST PHYS,D-09126 CHEMNITZ,GERMANY

来源：

SURFACE & COATINGS TECHNOLOGY | 1996年 / 84卷 / 1-3期

关键词：

ion implantation; amorphous carbon; electron energy loss spectroscopy; Raman spectroscopy;

D O I：

10.1016/S0257-8972(95)02791-2

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

Hard amorphous carbon films were prepared by ion-beam- assisted evaporation on silicon wafers. The effect of post-implantation (20 keV, 200 keV) with film-forming carbon species and non-film-forming inert neon ions was studied as a function of the implanted fluence. In order to establish ion-induced changes in the mechanical and structural properties, the as-deposited and post-implanted films were characterized by ultramicrohardness measurements, Raman spectroscopy and electron energy loss spectroscopy. A significant improvement of the hardness was found, correlated with sp(2) to sp(3) transformation, by implantation of 20 keV carbon ions.

引用

页码：495 / 499

页数：5

共 16 条

[1]

BEERMAN D, 1984, PHYS REV B, V30, P870

[2] MICRO-RAMAN ANALYSIS OF THIN-FILM DIAMOND TEMPERATURE SENSORS [J].

BHARGAVA, S ;

JOSHI, H ;

BIST, HD ;

ASLAM, M .

JOURNAL OF RAMAN SPECTROSCOPY, 1993, 24 (07) :417-422

[3] USE OF RAMAN-SCATTERING TO INVESTIGATE DISORDER AND CRYSTALLITE FORMATION IN AS-DEPOSITED AND ANNEALED CARBON-FILMS [J].

DILLON, RO ;

WOOLLAM, JA ;

KATKANANT, V .

PHYSICAL REVIEW B, 1984, 29 (06) :3482-3489

[4]

Dresselhaus M.S., 1992, ION IMPLANTATION DIA, V1

[5] STRUCTURAL STUDIES OF DIAMOND FILMS AND ULTRAHARD MATERIALS BY RAMAN AND MICRO-RAMAN SPECTROSCOPIES [J].

HUONG, PV .

[6] HIGH-TEMPERATURE RAMAN STUDIES OF DIAMOND THIN-FILMS [J].

JOHNSTON, C ;

CROSSLEY, A ;

CHALKER, PR ;

BUCKLEYGOLDER, IM ;

KOBASHI, K .

[7] The effect of a post-treatment of amorphous carbon films with high energy ion beams [J].

Kolitsch, A ;

Richter, E ;

Drummer, H ;

Roland, U ;

Ullmann, J .

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1995, 106 (1-4) :511-516

[8] THE EFFECT OF ION ENERGY ON THE DIAMOND-LIKE GRAPHITIC (SP(3)/SP(2)) NATURE OF CARBON-FILMS DEPOSITED BY ION-BEAMS [J].

LIFSHITZ, Y ;

LEMPERT, GD ;

ROTTER, S ;

AVIGAL, I ;

UZANSAGUY, C ;

KALISH, R ;

KULIK, J ;

MARTON, D ;

RABALAIS, JW .

[9]

MUHLING I, 1989, THESIS TU KARL MARX

[10] PI-BONDED CLUSTERS IN AMORPHOUS-CARBON MATERIALS [J].

ROBERTSON, J .

PHILOSOPHICAL MAGAZINE B-PHYSICS OF CONDENSED MATTER STATISTICAL MECHANICS ELECTRONIC OPTICAL AND MAGNETIC PROPERTIES, 1992, 66 (02) :199-209

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