An invasive catheter flow sensor with on-chip CMOS readout electronics for the on-line determination of blood flow

被引：19

作者：

Kersjes, R ^{[1
]}

Lienscher, F ^{[1
]}

Spiegel, E ^{[1
]}

Manoli, Y ^{[1
]}

Mokwa, W ^{[1
]}

机构：

[1] STERIMED GMBH,SENSOR DEPT,D-48165 MUNSTER,GERMANY

来源：

SENSORS AND ACTUATORS A-PHYSICAL | 1996年 / 54卷 / 1-3期

关键词：

silicon sensors; blood bow; on-chip electronics; catheters; silicon membranes; invasive measurement;

D O I：

10.1016/S0924-4247(97)80015-5

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

A silicon flow sensor with integrated electronics for invasive blood-flow measurement has been developed and investigated. The flow sensor is based on a silicon-on-insulator SIMOX (separation by implanted oxygen) substrate with a backside etched silicon membrane containing oxide trenches and uses a differential thermal measurement principle. The chosen fabrication process is fully CMOS-compatible. An on-chip switched-capacitor circuitry converts the Row signal into a pulse-width-modulated signal. The device has been tested in a blood-circulation simulator in the flow range 0-101 min(-1) within a vessel with a diameter of 2 cm. It has been found to be useful for the observation of time-dependent flow pulses as well as for the determination of the cardiac output. A prototype version of the Bow-sensor system has a membrane temperature of less than 2 K above ambient temperature, a total power consumption of 5 mW and shows a pulse-width change from 45 to 25 mu s for the flow range 0-101 min-(1).

引用

页码：563 / 567

页数：5

共 6 条

[1]

BUCHWALSKY R, 1992, EINSCHWEMMKATHETER T, P105

[2] AN ULTRASENSITIVE SILICON PRESSURE-BASED MICROFLOW SENSOR [J].