High-resolution X-ray spectroscopy for copper and copper oxides and a new WDX system using an ion microbeam

High-resolution Cu L X-ray spectra from Cu, Cu2O and CuO targets induced by MeV H, He, C and F ions have been measured. High-resolution Cu Lalpha(1,2) and Lbeta(1) X-ray spectra from Cu, Cu2O and CuO targets induced by 2.0 MeV focused protons have been also measured. It is shown that high-resolution X-ray spectra are sensitive to the chemical states of the emitting projectile and target atoms. The Cu Lalpha(1,2) and Lbeta(1) X-ray spectra were compared with Cu 2p XPS spectra to investigate the atomic and electronic structures and electron excitation and relaxation processes in Cu and its compounds. High-resolution X-ray spectroscopy with a microbeam is found to be useful for analysis of the chemical environment of atoms of interest in the near surface region of bulk and particle samples. (C) 2002 Elsevier Science B.V. All rights reserved.