Fabrication of proton conductor SrCeO3 thin films by excimer laser deposition

被引：12

作者：

Yugami, H ^{[1
]}

Naito, H ^{[1
]}

Arashi, H ^{[1
]}

Ishigame, M ^{[1
]}

机构：

[1] TOHOKU UNIV,SCI MEASUREMENTS RES INST,AOBA KU,SENDAI,MIYAGI 98077,JAPAN

来源：

SOLID STATE IONICS | 1996年 / 86-8卷

关键词：

proton conductor; SrCeO3; laser deposition; Raman;

D O I：

10.1016/0167-2738(96)00306-2

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

Thin films of a perovskite proton conductor SrCeO3 were fabricated by ArF excimer laser deposition method using bulk SrCeO3 ceramic targets. For incident laser fluences greater than similar to 1 J/cm(2), ablative deposition was observed. SrCeO3 films with predominant growth along the (200) and (121) were deposited on Si and MgO substrates at 600 degrees C. We have found that the oxygen pressure during deposition is the most critical parameter for obtaining oriented films.

引用

页码：1307 / 1310

页数：4

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