Low-dielectric-constant materials for ULSI interlayer-dielectric applications

被引:239
作者
Lee, WW [1 ]
Ho, PS [1 ]
机构
[1] UNIV TEXAS,LAB INTERCONNECT & PACKAGING,AUSTIN,TX 78712
关键词
D O I
10.1557/S0883769400034151
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
引用
收藏
页码:19 / 24
页数:6
相关论文
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