Hydrogen dilution profiling for hydrogenated microcrystalline silicon solar cells

被引：98

作者：

Yan, BJ

Yue, GZ

Yang, J

Guha, S

Williamson, DL

Han, D

Jiang, CS

机构：

[1] United Solar Ovon Corp, Troy, MI 48084 USA

[2] Colorado Sch Mines, Dept Phys, Golden, CO 80401 USA

[3] Univ N Carolina, Dept Phys & Astron, Chapel Hill, NC 27599 USA

[4] Natl Renewable Energy Lab, Golden, CO 80401 USA

来源：

APPLIED PHYSICS LETTERS | 2004年 / 85卷 / 11期

关键词：

The authors thank S. R. Ovshinsky and H. Fritzsche for their consistent encouragement. This work was supported by NREL under the thin-film partnership program Subcontract No. ZDJ-2-30630-19 at United Solar; No. XDJ-2-30630-27 at Colorado School of Mines; No. ADJ-1-30630-09 at University of North Carolina; and by DOE under Contract No. DE-AC36-99G010337 at National Renewable Energy Laboratory;

D O I：

10.1063/1.1788877

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

The structural properties of hydrogenated microcrystalline silicon solar cells are investigated using Raman, x-ray diffraction, and atomic force microscopy. The experimental results showed a significant increase of microcrystalline volume fraction and grain size with increasing film thickness. The correlation between the cell performance and the microstructure suggests that the increase of grain size and microcrystalline volume fraction with thickness is the main reason for the deterioration of cell performance as the intrinsic layer thickness increases. By varying the hydrogen dilution in the gas mixture during deposition, microstructure evolution has been controlled and cell performance significantly improved. (C) 2004 American Institute of Physics.

引用

页码：1955 / 1957

页数：3

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