New perspectives of gas sensor technology

被引：480

作者：

Yamazoe, Noboru ^{[1
]}

Shimanoe, Kengo ^{[1
]}

机构：

[1] Kyushu Univ, Fac Engn Sci, Fukuoka 8168580, Japan

来源：

SENSORS AND ACTUATORS B-CHEMICAL | 2009年 / 138卷 / 01期

关键词：

Semiconductor; Gas sensor; Oxide; Receptor; Depletion; MEMS; GRAIN-SIZE; COMPONENT CRYSTALS; SENSITIVITY; ROLES; SHAPE;

D O I：

10.1016/j.snb.2009.01.023

中图分类号：

O65 [分析化学];

学科分类号：

070302 [分析化学];

摘要：

Two recent topics important for advancing gas sensor technology are introduced. Semiconductor gas sensors have been developed so far on empirical bases but now a fundamental theory has been made available for further developments. The theory reveals the roles of physical properties of semiconductors and chemical properties of gases in the receptor function. MEMS techniques have been applied to fabrication of micro-platforms for use in gas sensors. The micro-platforms appear to provide gas sensors with new innovative function. (C) 2009 Elsevier B.V. All rights reserved.

引用

页码：100 / 107

页数：8

共 20 条

[1]

Wet process-prepared thick films of WO3 for NO2 sensing [J].