Mueller-matrix ellipsometry: a review

被引:32
作者
Azzam, RMA
机构
来源
POLARIZATION: MEASUREMENT, ANALYSIS, AND REMOTE SENSING | 1997年 / 3121卷
关键词
Mueller matrix; ellipsometry; polarimetry; polarization; scattering;
D O I
10.1117/12.283870
中图分类号
TH7 [仪器、仪表];
学科分类号
0804 ; 080401 ; 081102 ;
摘要
Techniques for the partial or complete determination of the Mueller matrix of elastic light scattering by a given. sample are reviewed. Important developments include several implementations and applications of the dual-rotating-retarder Mueller-matrix ellipsometer and the addition of imaging, scanning, and spectroscopic capabilities. The use of a multi-channel division-of-amplitude photopolarimeter as a polarization state detector, and the proper modulation (or control) of the polarization state generator have substantially increased the efficiency and speed with which the full Mueller matrix can be measured.
引用
收藏
页码:396 / 405
页数:10
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