Processing of catalysts by atomic layer epitaxy: modification of supports

被引:40
作者
Lindblad, M [1 ]
Haukka, S [1 ]
Kytokivi, A [1 ]
Lakomaa, EL [1 ]
Rautiainen, A [1 ]
Suntola, T [1 ]
机构
[1] NESTE OY,FIN-06101 PORVOO,FINLAND
关键词
atomic layer epitaxy (ALE); catalyst preparation; surface modification; gas-solid reactions; surface saturation;
D O I
10.1016/S0169-4332(97)00307-3
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
摘要
Different supports were modified with titania, zirconia and chromia by the atomic layer epitaxy technique (ALE). In ALE, a metal precursor is bound to the supper? in saturating gas-solid reactions. Surface oxides are grown by alternating reactions of the metal precursor and an oxidizing agent. Growth mechanisms differ depending on the precursor-support pair and the processing conditions, In this work, the influences of the support, precursor and reaction temperature were investigated by comparing the growth of titania from Ti(OCH(CH3)(2))(4) on silica and alumina, titania from TiCl4 and Ti(OCH(CH3)(2))(4) on silica, and zirconia from ZrCl4 on silica and alumina, The modification of porous oxides supported on metal substrates (monoliths) was demonstrated for the growth of chromia from Cr(acac)(3). (C) 1997 Elsevier Science B.V.
引用
收藏
页码:286 / 291
页数:6
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