Expansion dynamics of the plasma plume created by laser ablation in a background gas

被引:24
作者
Garrelie, F [1 ]
Champeaux, C [1 ]
Catherinot, A [1 ]
机构
[1] CNRS, UMR 6638, SPCTS, Fac Sci, F-87060 Limoges, France
来源
APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING | 1999年 / 69卷
关键词
D O I
10.1007/s003390051355
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
The dynamics of the expansion of the plasma plume induced by laser ablation of a copper target at a fluence of 17 J/cm(2) was investigated theoretically by means of a Monte Carlo simulation. When the expansion occurs under a relatively high pressure, the ambient gas particles may be involved in the collective motion of the plume. The simulation allows the study of the simultaneous collective motion of different species, such as the laser-ablated and the ambient gas particles. The influence of the background gas, nature and pressure on the laser-induced plasma plume expansion behavior was studied. The expansion dynamics were found to be different in the case of the expansion in ambient gases of different molecular weight. The dynamics of the plume expansion under an argon pressure of 200 Pa seem to be strongly related to the equilibration of the pressure gradients in the gas phase, and evidence of the oscillatory behavior of the plume expansion was shown from the evolution over time of the pressure profiles in the plume. This behavior has also been observed in similar conditions for a krypton atmosphere, but fora lower pressure than for argon. The vortical flow formation at the plume periphery, involving both the laser-ablated and the argon particles at moderate pressure, was also predicted from the Monte Carlo simulation.
引用
收藏
页码:S55 / S58
页数:4
相关论文
共 18 条
[1]   Study of the expansion of the laser ablation plume above a boron nitride target [J].
Angleraud, B ;
Girault, C ;
Champeaux, C ;
Garrelie, F ;
Germain, C ;
Catherinot, A .
APPLIED SURFACE SCIENCE, 1996, 96-8 :117-121
[2]  
Bird G.A., 1976, MOL GAS DYNAMICS
[3]   DYNAMICS OF LASER-INDUCED PLUME EXPANSION INTO AN AMBIENT GAS DURING FILM DEPOSITION [J].
BULGAKOV, AV ;
BULGAKOVA, NM .
JOURNAL OF PHYSICS D-APPLIED PHYSICS, 1995, 28 (08) :1710-1718
[4]   Gas-dynamic effects of the interaction between a pulsed laser-ablation plume and the ambient gas: analogy with an underexpanded jet [J].
Bulgakov, AV ;
Bulgakova, NM .
JOURNAL OF PHYSICS D-APPLIED PHYSICS, 1998, 31 (06) :693-703
[5]  
Chrisey D. B., 1994, PULSED LASER DEPOSIT
[6]   THE YTTRIUM-OXIDE CHEMILUMINESCENCE FROM THE 308 NM EXCIMER-LASER ABLATION OF YBA2CU3O7-X, Y2O3, AND YCL3 [J].
FRIED, D ;
KUSHIDA, T ;
RECK, GP ;
ROTHE, EW .
JOURNAL OF APPLIED PHYSICS, 1993, 73 (11) :7810-7817
[7]   Study by a Monte Carlo simulation of the influence of a background gas on the expansion dynamics of a laser-induced plasma plume [J].
Garrelie, F ;
Champeaux, C ;
Catherinot, A .
APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING, 1999, 69 (01) :45-50
[8]   Monte Carlo simulation of the laser-induced plasma-plume expansion under vacuum and with a background gas [J].
Garrelie, F ;
Catherinot, A .
APPLIED SURFACE SCIENCE, 1999, 138 :97-101
[9]   Monte Carlo simulation of the laser-induced plasma plume expansion under vacuum: Comparison with experiments [J].
Garrelie, F ;
Aubreton, J ;
Catherinot, A .
JOURNAL OF APPLIED PHYSICS, 1998, 83 (10) :5075-5082
[10]  
GARRELIE F, 1998, THESIS U LIMOGES