Quantum jumps in FeRAM technology and performance

被引:22
作者
Otsuki, T
Arita, K
机构
[1] Electronics Research Laboratory, Matsushita Electronics Corporation, Takatsuki, Osaka 569-11
关键词
ferroelectric memories; layered perovskites; integration technology;
D O I
10.1080/10584589708012979
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
Layered perovskite ferroelectric materials (also known as ''Y-1'') allowed a quantum jump in Ferroelectric Random Access Memories (FeRAMs) due to their low operating voltages and excellent endurance properties. The ability to impose technological control in the material microstructure and overall device properties has made a major impact in the commercialization of FeRAMs. In this paper, we review our new material and integration technologies, and present the performance of ''state-of-the-art'' devices incorporating Y-1 FeRAMs, such as a microcontroller and an RF-ID tag. These data indicate not only the great potential of the Y-1 technology but also its maturity for the production of commercial products.
引用
收藏
页码:31 / 43
页数:13
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