Strategies for void-free liquid filling of micro cavities

被引:18
作者
Goldschmidtboeing, Frank [1 ]
Rabold, Martin [1 ]
Woias, Peter [1 ]
机构
[1] Univ Freiburg, Dept Microsyst Engn, Lab Design Microsyst, IMTEK, D-79110 Freiburg, Germany
关键词
CAPILLARY; FLOW; DYNAMICS; MICROCHANNEL; SURFACES; GROWTH;
D O I
10.1088/0960-1317/16/7/029
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
080906 [电磁信息功能材料与结构]; 082806 [农业信息与电气工程];
摘要
We deal with the problem of void-free capillary filling of micro cavities. Special emphasis is given to the effect of critical edges. Analytical, numerical and experimental methods are used to examine the capillary filling of micro cavities. The advantages and disadvantages of these methods are discussed in detail. In summary, a brief theory of the capillary dynamics in critical edges is established. Strategies are introduced to conduct a design for void-free filling of microfluidic devices on the basis of critical edges and pinning barriers.
引用
收藏
页码:1321 / 1330
页数:10
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