Polyimide optical waveguide with multi-fan-out for multi-chip module application

We developed a polyimide optical waveguide with multi-fan-out which can be used as an optical interconnection between the many LSI chips in a multichip module system. The propagation direction of the signal light is changed from horizontal to vertical and from;vertical to horizontal using aluminum micromirrors in this waveguide. We then introduced a signal light into this waveguide, the propagation direction of which was bent by an aluminum micromirror. It impinged on the photodiode to induce a significant increase in the photodiode current.