Mapping chemical and bonding information using multivariate analysis of electron energy-loss spectrum images

被引:229
作者
Bosman, M. [1 ]
Watanabe, M.
Alexander, D. T. L.
Keast, V. J.
机构
[1] Univ Sydney, Australian Key Ctr Microscopy & Microanal, Sydney, NSW 2006, Australia
[2] Lehigh Univ, Dept Mat Sci & Engn, Bethlehem, PA 18015 USA
[3] Univ Cambridge, Dept Mat Sci & Met, Cambridge CB2 3QZ, England
基金
澳大利亚研究理事会;
关键词
principal component analysis; EELS; spectrum imaging;
D O I
10.1016/j.ultramic.2006.04.016
中图分类号
TH742 [显微镜];
学科分类号
摘要
Electron energy-loss spectroscopy (EELS) in the transmission electron microscope (TEM) is used to obtain high-resolution information on the composition and the type of chemical bonding of materials. Spectrum imaging, where a full EEL spectrum is acquired and stored at each pixel in the image, gives an exact correlation of spatial and spectral features. However, determining and extracting the important spectral components from the large amount of information contained in a spectrum image (SI) can be difficult. This paper demonstrates that principal component analysis of EEL SIs can be used to extract chemically relevant components. With weighted or two-way scaled principal component analysis, both compositional and bonding information can be extracted. Mapping of the chemical variations in a partially reduced titanium dioxide sample and the orientation-dependent bonding in boron nitride and carbon nanotubes are given as examples. (c) 2006 Elsevier B.V. All rights reserved.
引用
收藏
页码:1024 / 1032
页数:9
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