Etch stop techniques for micromachining

被引：47

作者：

Collins, SD

机构：

[1] Damien Associates, Davis

来源：

JOURNAL OF THE ELECTROCHEMICAL SOCIETY | 1997年 / 144卷 / 06期

关键词：

D O I：

10.1149/1.1837773

中图分类号：

O646 [电化学、电解、磁化学];

学科分类号：

081704 ;

摘要：

A presentation of etch stop engineering is presented with a review of the present state of the art in etch stop micromachining. This review assumes a global definition for an etch stop and focuses on salient examples of common etch stop techniques, as well as unique and/or novel etch stop methods. A table of representative etch stops is also presented as a summary.

引用

收藏

页码：2242 / 2262

页数：21

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