Simultaneous and consistent analysis of NRA, RES and ERDA data with the IBA DataFurnace

We present in this paper, for the first time, the extension of the ion beam analysis DataFurnace to the analysis of non-resonant nuclear reaction analysis (NRA) data. The NRA routine is general and can be used to analyse data from any reaction with known Q and cross section. The shape of the cross section is taken into account and hence depth profiling using reactions with non-flat cross sections is easily done. We show different applications of the program, including profiling of deuterium with a He-3 beam and profiling of N in a stainless steel matrix using a deuterium beam. In the latter case, we also performed 35 MeV Cl-ERDA and D-RBS experiments of the same sample. The Ion Beam Analysis DataFurnace allows to analyse all the data simultaneously, taking into account all the information present in the different data sets in a fully consistent manner. (C) 2000 Published by Elsevier Science B.V. All rights reserved.