An electrostatic force microscope (EFM) and a Kelvin probe are used to characterize the charges embedded in thin anodic alumina layers of thickness ranging from 100 to 400 nm. Introducing a method for obtaining self-supported alumina layers, we exhibit the presence of positive charges at the metal/oxide interface of anodic alumina layers. These positive charges, together with the negative charges present at the surface of the anodic layer, induce a true polarization of the layer. The magnitude of this polarization depends on the conditions of preparation of the layers and can be well controlled. As a second step, we show the influence of this polarization on charge injection in these layers with EFM: charges of both signs may be injected in unpolarized layers whereas one cannot inject negative charges in polarized layers, which thus exhibit a diode-like behavior. (C) 2002 American Institute of Physics.